Brooks Instrument

Mass flow controllers and meters, variable area flow meters and pressure and vacuum instruments for process and semiconductor applications.

Brooks Instrument products (61)

• Brooks Instrument 0254 Brooks 0254 Secondary Electronics — Four-channel secondary electronics for visual indication, control and external power to Brooks mass-flow products.
• Brooks Instrument 0260 Brooks 0260 Smart Interface — Windows-based software and hardware package for monitoring, controlling, logging, blending and batching Brooks devices.
• Brooks Instrument 1250A Brooks Sho-Rate 1250A Rotameter — Brooks Sho-Rate variable-area flow meter model 1250A.
• Brooks Instrument 1255A Brooks Sho-Rate 1255A Rotameter — Brooks Sho-Rate variable-area flow meter model 1255A.
• Brooks Instrument 1350G Brooks Sho-Rate 1350G Rotameter — Brooks Sho-Rate variable-area flow meter model 1350G.
• Brooks Instrument 1355G Brooks Sho-Rate 1355G Rotameter — Brooks Sho-Rate variable-area flow meter model 1355G.
• Brooks Instrument 2500 Series Brooks 2500 Series Rotameter — Low-cost acrylic variable-area flow meter for gas or liquid measurement.
• Brooks Instrument 3750C Brooks MT3750 3750C Metal Tube Flow Meter — Metal-tube variable-area flow meter model 3750C for low-flow gas and liquid measurement.
• Brooks Instrument 3809G Brooks MT3809G Metal Tube Flow Meter — Brooks lists the 3809G configuration within the MT3809 family. Full ordering codes depend on construction, meter and connection size, connection type, indicator, electronics and valve options.
• Brooks Instrument 4800 Series Brooks 4800 Series Mass Flow Controller — Legacy Brooks mass-flow controller family for gas-flow measurement and control.
• Brooks Instrument 5800E Brooks 5800E Mass Flow Controller — Brooks 5800E mass-flow controller model family.
• Brooks Instrument 5800i Brooks 5800i Mass Flow Controller — Brooks 5800i mass-flow controller model family.
• Brooks Instrument 5850EM Brooks 5850EM Metal-Sealed Mass Flow Controller — Metal-sealed mass-flow controller for high-pressure, ultra-clean gas applications.
• Brooks Instrument 5850EMH Brooks 5850EMH High-Temperature Mass Flow Controller — High-temperature model in Brooks' metal-sealed mass-flow controller family.
• Brooks Instrument 5851EM Brooks 5851EM Metal-Sealed Mass Flow Controller — Metal-sealed mass-flow controller model 5851EM for high-pressure, ultra-clean gas applications.
• Brooks Instrument 5851EMH Brooks 5851EMH High-Temperature Mass Flow Controller — High-temperature model in Brooks' metal-sealed mass-flow controller family.
• Brooks Instrument 5866RT Brooks 5866RT Pressure Controller and Flow Meter — Pressure controller that also measures flow in high-pressure gas applications.
• Brooks Instrument 8000MP Brooks Thermal Mass Flow Meter/Controller 8000MP — Brooks thermal mass-flow product model 8000MP.
• Brooks Instrument 8000MPNH Brooks Thermal Mass Flow Meter/Controller 8000MPNH — Brooks thermal mass-flow product model 8000MPNH.
• Brooks Instrument 8100MP Brooks Thermal Mass Flow Meter/Controller 8100MP — Brooks thermal mass-flow product model 8100MP.
• Brooks Instrument 8100MPNH Brooks Thermal Mass Flow Meter/Controller 8100MPNH — Brooks thermal mass-flow product model 8100MPNH.
• Brooks Instrument 8200MP Brooks Thermal Mass Flow Meter/Controller 8200MP — Brooks thermal mass-flow product model 8200MP.
• Brooks Instrument 8200MPNH Brooks Thermal Mass Flow Meter/Controller 8200MPNH — Brooks thermal mass-flow product model 8200MPNH.
• Brooks Instrument 8500 Series NRS Brooks 8500 Series NRS Needle Control Valve — Non-rising-stem control needle valve for very low gas or liquid flow.
• Brooks Instrument 8600MP Brooks Thermal Mass Flow Meter/Controller 8600MP — Brooks thermal mass-flow product model 8600MP.
• Brooks Instrument 8600MPNH Brooks Thermal Mass Flow Meter/Controller 8600MPNH — Brooks thermal mass-flow product model 8600MPNH.
• Brooks Instrument 8601 Brooks 8601 Mechanical Pressure Regulator — High-precision mechanical supply-pressure regulator model 8601.
• Brooks Instrument 8700MP Brooks Thermal Mass Flow Meter/Controller 8700MP — Brooks thermal mass-flow product model 8700MP.
• Brooks Instrument 8700MPNH Brooks Thermal Mass Flow Meter/Controller 8700MPNH — Brooks thermal mass-flow product model 8700MPNH.
• Brooks Instrument 8800MP Brooks Thermal Mass Flow Meter/Controller 8800MP — Brooks thermal mass-flow product model 8800MP.
• Brooks Instrument 8800MPNH Brooks Thermal Mass Flow Meter/Controller 8800MPNH — Brooks thermal mass-flow product model 8800MPNH.
• Brooks Instrument 9100MP Brooks Thermal Mass Flow Meter/Controller 9100MP — Brooks thermal mass-flow product model 9100MP.
• Brooks Instrument 9100MPNH Brooks Thermal Mass Flow Meter/Controller 9100MPNH — Brooks thermal mass-flow product model 9100MPNH.
• Brooks Instrument 9200MP Brooks Thermal Mass Flow Meter/Controller 9200MP — Brooks thermal mass-flow product model 9200MP.
• Brooks Instrument 9200MPNH Brooks Thermal Mass Flow Meter/Controller 9200MPNH — Brooks thermal mass-flow product model 9200MPNH.
• Brooks Instrument 9700MP Brooks Thermal Mass Flow Meter/Controller 9700MP — Brooks thermal mass-flow product model 9700MP.
• Brooks Instrument 9700MPNH Brooks Thermal Mass Flow Meter/Controller 9700MPNH — Brooks thermal mass-flow product model 9700MPNH.
• Brooks Instrument 9800MP Brooks Thermal Mass Flow Meter/Controller 9800MP — Brooks thermal mass-flow product model 9800MP.
• Brooks Instrument 9800MPNH Brooks Thermal Mass Flow Meter/Controller 9800MPNH — Brooks thermal mass-flow product model 9800MPNH.
• Brooks Instrument 9861 Brooks 9861 High-Temperature Mass Flow Controller — High-temperature mass-flow controller model 9861.
• Brooks Instrument CMCA Brooks CMC/CMCA Unheated Capacitance Manometer — Unheated capacitance manometer family for vacuum pressure measurement.
• Brooks Instrument CMX0 Brooks XacTorr CMX0 Heated Capacitance Manometer — Brooks XacTorr heated capacitance manometer model family CMX0.
• Brooks Instrument CMX1 Brooks XacTorr CMX1 Heated Capacitance Manometer — Brooks XacTorr heated capacitance manometer model family CMX1.
• Brooks Instrument CMX2 Brooks XacTorr CMX2 Heated Capacitance Manometer — Brooks XacTorr heated capacitance manometer model family CMX2.
• Brooks Instrument CMX3 Brooks XacTorr CMX3 Heated Capacitance Manometer — Brooks XacTorr heated capacitance manometer model family CMX3.
• Brooks Instrument GF040 Brooks GF040 High-Purity Mass Flow Controller — Metal-sealed mass-flow controller model GF040 for high-purity gas applications.
• Brooks Instrument GF080 Brooks GF080 High-Purity Mass Flow Controller — Metal-sealed mass-flow controller model GF080 for high-purity gas applications.
• Brooks Instrument GF135 Brooks GF135 PTI Mass Flow Controller — Legacy Brooks GF135 pressure-transient-insensitive mass-flow controller.
• Brooks Instrument GT1600 Brooks GT1600 Glass Tube Variable-Area Flow Meter — Brooks GT1600 glass-tube variable-area flow meter for gas or liquid service; model family is published by the manufacturer.
• Brooks Instrument IPS122 Brooks IPS122 Pressure Switch — Pressure switch model IPS122 in Brooks' 122 Series.
• Brooks Instrument IPT122 Brooks IPT122 Pressure Transmitter — Pressure transmitter model IPT122 in Brooks' 122 Series.
• Brooks Instrument QMC-C-B-A-1L-1-A Brooks Quantim QMC Coriolis Mass Flow Controller — Configured Variant — Published QMC model-code variant for low-flow Coriolis mass-flow control.
• Brooks Instrument SFP-CA Brooks Seal-Free Pressure Transmitter SFP-CA for Ultrapure Chemicals — Brooks seal-free pressure transmitter variant SFP-CA.
• Brooks Instrument SFP-WA Brooks Seal-Free Pressure Transmitter SFP-WA for Ultrapure Water — Brooks seal-free pressure transmitter variant SFP-WA.
• Brooks Instrument SLA5810 Brooks SLA5810 Pressure Controller — Brooks pressure controller model SLA5810.
• Brooks Instrument SLA5820 Brooks SLA5820 Pressure Controller — Brooks pressure controller model SLA5820.
• Brooks Instrument SLA5840 Brooks SLA5840 Pressure Controller — Brooks pressure controller model SLA5840.
• Brooks Instrument SLA5850-7-1B-1-A-REVB Brooks SLA5850 Mass Flow Controller — EtherNet/IP, 1/4-in Connection — Published SLA5850 configuration code with EtherNet/IP and 1/4-inch tube-compression connection.
• Brooks Instrument SLA7840 Brooks SLA7840 Pressure Controller — Brooks pressure controller model SLA7840.
• Brooks Instrument SLAMF10 Brooks SLAMF10 Pressure Controller — Brooks elastomer-sealed pressure controller model SLAMF10.
• Brooks Instrument SLAMF20 Brooks SLAMF20 Pressure Controller — Brooks elastomer-sealed pressure controller model SLAMF20.