Brooks 5851EM Metal-Sealed Mass Flow Controller

Manufacturer: Brooks Instrument — 5850EM Series

Part number: 5851EM

Category: Instrumentation

Metal-sealed mass-flow controller model 5851EM for high-pressure, ultra-clean gas applications.

Description

Metal-sealed mass-flow controller model 5851EM for high-pressure, ultra-clean gas applications. Brooks identifies these as specific model numbers; the full ordered variant still depends on gas, flow range, interface, valve and connection options.

Applications

• Precision gas measurement and control
• high-purity process gas delivery

Industries

• Semiconductor
• Fiber Optics
• LED/MOCVD
• Chemical Processing

Manufacturer datasheet

Available on request — pricing is quoted per enquiry. Request a quotation.

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