Brooks 5851EMH High-Temperature Mass Flow Controller
Manufacturer: Brooks Instrument — 5850EMH Series
Part number: 5851EMH
Category: Instrumentation
High-temperature model in Brooks' metal-sealed mass-flow controller family.
Description
High-temperature model in Brooks' metal-sealed mass-flow controller family. Brooks identifies these as specific model numbers; the full ordered variant still depends on gas, flow range, interface, valve and connection options.
Applications
- Precision gas measurement and control
- high-purity process gas delivery
Industries
- Semiconductor
- Fiber Optics
- LED/MOCVD
- Chemical Processing
Available on request — pricing is quoted per enquiry. Request a quotation.